Design of a Constant Probing Force System for Profilometer

Abstract:

The core component of profilometer is a stylus displacement measuring system, whose resolution reaches nanoscale. Since the stylus tip is very small, a variation on probing force has a great impact on the results of high-precision displacement measurements. In this paper, a special flat rectangular voice coil motor is designed to realize a constant probing force for the stylus displacement measuring system. Experimental results show the probing force can be adjusted from 5mg to 1000mg and the resolution can reach 5mg.

• Periodical: Applied Mechanics and Materials (Volumes 511-512)
• Pages: 301-306
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.511-512.301
• Online since: February 2014
• Authors: Shou Bin Liu*, Zhan Ping Li
• Keywords: Constant Probing Force, Displacement Measurement, Stylus, Voice Coil Motor (VCM)

References

[1] D. J. Whitehouse: Contemporary Physics, Vol. 49(2008), pp.351-374.

[2] Pau H. Hall, Steven A. Riley and Robert G. Rizos, U.S. Patent 4, 669, 300. (1987).

[3] I. K. Buehring and D. Mansfield: Proc. of 9th IPES(1997), pp.58-60.

[4] Alain C. Diebold: Handbook of Silicon Semiconductor Metrology (Marcel Dekker, Inc. 2001).

[5] Edward P. Furlani: Permanent Magnet and Electromechanical Devices (Academic Press, 2001).