Structural Properties of Deposited ZnO Thin Films on Flexible Substrates at Various Substrate Temperatures and RF Power

Nur Sa’adah Muhamad Sauki; Sukreen Hana Herman; Mohd Hanafi Ani; Rusop Mahmood Mohamad

doi:10.4028/www.scientific.net/AMR.576.598

Paper Titles

Dielectric Properties of PVDF-TrFE/PMMA: TiO₂ Multilayer Dielectric Thin Films
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Effect of Deposition Voltage on Microstructure and Optical Properties of TiO₂ Thin Film via Electrophoretic Deposition
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Friction Coefficient of Polymer and Composite Materials Sliding against Stainless Steel
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Deposition on SS 316 at Different Gas Flow Rates Using Thermal CVD
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Structural Properties of Deposited ZnO Thin Films on Flexible Substrates at Various Substrate Temperatures and RF Power
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Influence of Post Annealing Temperature on the Properties of ZnO Films Prepared by RF Magnetron Sputtering
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Structural, Optical and Electrical Characterization of Mo Doped In₂O₃ Thin Films Prepared via Sol-Gel Spin Coating Technique
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The Effect of Camphor Oil Amounts on the Properties of Amorphous Carbon Thin Films by Thermal Chemical Vapor Deposition
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Fundamental Study on the Carbonization Characteristics of Low Rank Coal Under Low Temperature and its Application on Traditional Blacksmith
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Structural Properties of Deposited ZnO Thin Films on Flexible Substrates at Various Substrate Temperatures and RF Power

Abstract:

ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF power. It is observed that the deposition rate increased as the temperature and RF power increased. FE-SEM images confirmed that microstructure of the thin films consists of nanoparticles. XRD data confirmed that the ZnO thin films at various RF power and substrate temperature have (002) structure.

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Periodical:

Advanced Materials Research (Volume 576)

Pages:

598-601

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.576.598

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Online since:

October 2012

Authors:

Nur Sa’adah Muhamad Sauki, Sukreen Hana Herman, Mohd Hanafi Ani, Rusop Mahmood Mohamad

Keywords:

RF Magnetron Sputtering, RF Power, Structural Property, Substrate Temperature, ZnO Thin Film

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