Surface Morphology and Electrical Properties of Al:ZnO Films Deposited by Spin Coating Process

Mohd Zainizan Sahdan; Sharul Ashikin Kamaruddin; Kah Yoong Chan; Uda Hashim; Nafarizal Nayan; Hashim Saim

doi:10.4028/www.scientific.net/AMR.925.416

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 925Surface Morphology and Electrical Properties of...

Surface Morphology and Electrical Properties of Al:ZnO Films Deposited by Spin Coating Process

Abstract:

Aluminium (Al) doped zinc oxide (ZnO) has been considered as one of the promising transparent conducting oxide for wide applications in electronic devices. In this investigation, sol-gel spin coating process were employed to fabricate Al:ZnO on glass coated with indium tin oxide (ITO) substrate. In order to expose the effects of aluminium concentration on the structural and electrical properties of the ZnO films, different Al concentrations (1 at.%, 3 at.% and 5 at.%) were used. A field emission scanning electron microscope (FESEM) and a two point probe were employed to examined the material properties of the Al:ZnO films. Through the FESEM results, the Al:ZnO films show different morphologies behaviour with increasing the Al concentrations. Besides, the electrical conductivity was increased by increasing the dopant source and the lowest resistivity was obtained at 5 at.%. In general, the Al concentration exerts strong influence on the ZnO films properties. Keywords: Transparent conducting oxide, X-ray diffraction, sol gel

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Periodical:

Advanced Materials Research (Volume 925)

Pages:

416-419

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.925.416

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Online since:

April 2014

Authors:

Mohd Zainizan Sahdan*, Sharul Ashikin Kamaruddin, Kah Yoong Chan, Uda Hashim, Nafarizal Nayan, Hashim Saim

Keywords:

Sol Gel, Transparent Conducting Oxide, X-Ray Diffraction (XRD)

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